滚转角误差的光学精密测量技术研究

Optical Precision Measurement Technique of Rolling Error

提出了基于两点法的精密移动台滚转角测量新方法 ,可以将移动台滚转角误差与参考镜角形状误差分离开来。实验结果表明 ,滚转角误差的测量重复性精度可达 0 .0 5",这个值是由测量系统稳定性决定的。

A new method to measure rolling of a precision stage using the two- pointmethod is presented.The rolling of stage and the rolling angle profile can be separated from each other by using the angle sensor output data. Experimental results showed that the rolling can be measured to 0 .0 5' determined by the stability of the rolling measurementsystem.