摘要
介绍基于双PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和验证,并建立求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论影响测量过程的各种因素,提出消除其影响所应采取的措施。
A method based on position sensitive detector （PSD） to measure the ditch and yaw error and straightness error of long linear guide rails simultaneously is introduced. The measurement principle is analyzed and validated. The mathematical model of the ditch and yaw angle as well as straightness error after correction of laser space angle are built. The various factors that affect the measurement process are discussed and some measures are taken to eliminate the influence.
出处
《工具技术》
2014年第3期86-89,共4页
Tool Engineering
关键词
PSD
导轨
俯仰角
偏摆角
直线度
position sensitive detector （PSD）
guide
ditch angle
yaw angle
straightness error
