高精度标定和效验三维相位轮廓测量系统

Calibration and Inspection 3D Phase Profilometry Measurement System with High Accuracy

为了提高三维相位轮廓测量系统的测量精度,提出了一种系统标定的理论模型,并且实验验证了其正确性。为了进一步验证系统精度,使用空间上随机放置的1个和2个轴承滚珠,通过对滚珠的测量和分析,验证了标定方法的有效性。这种三维相位轮廓测量系统的标定和效验方法为它的应用提供了新的技术方案。

In order to improve the accuracy of the 3D phase profilometry system,a theoretical model for the system calibration is presented.Experiments are done for the verification of its correctness.Furthermore,to validate system accuracy,randomly placed ball bearings are used to verify the validity of the phase profilometry system calibration and efficacy methods calibration method,through the measurement and analysis.The 3D in this paper provide a new technical solution for its application.