高频气体击穿与真空击穿之间的联系

The Relation Between the High-frequency Gas Breakdown and the Vacuum Breakdown

文章采用基本物理参量,对于平板放电系统,探讨了高频放电的扩散机制和微放电机制。提出并采用等效特征扩散长度的概念,将高频气体击穿和真空击穿联系在一起。研究结果表明,在使用等效特征扩散长度后,由扩散机制计算出的高频击穿电场与实验更加吻合。此外,等效特征扩散长度表达式中的系数,与电极材料2次电子发射系数特性曲线中的第一交叉点能量密切相关。

By using the basic physics parameters,the high-frequency breakdown of the diffusion-controlled mechanism in gas and the multipactor mechanism in vacuum are discussed for parallel plates discharge system. In order to link the two mechanisms together,the concept of the equivalent characteristic diffusion length has been proposed and adopted to calculate the breakdown electric field in this paper. The study shows that the calculated breakdown electric field by using the equiva-lent characteristic diffusion length and the diffusion-controlled model more consistent with the experimental results. In addi-tion,the coefficient in the expression of the equivalent characteristic diffusion length is closely related to the energy of first cross-over point in the curves of the secondary electron yield of the electrode material.