摘要
分无镀膜 (或镀膜很薄 )和有较厚镀膜两种情况 ,对硅微谐振器的光激励振幅进行了分析计算 .针对有较厚镀膜的硅微谐振器 ,在理论分析的基础上 ,提出了一种新的光激振幅计算模型 ,理论计算与实验测试值吻合得很好 .
The analysis and calculation of the amplitude is given to the optically excitedsilicon microresonators which have or haven′t films,and a new model is built to the microresonator with films based on the heat conducting theory,the thermal strain theory and the mechanical vibration theory.The comparison between the theoretical values and experimental values shows that the new model is more accurate.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2001年第1期99-103,共5页
Acta Photonica Sinica
基金
The projectsupported by the National Nature Science Foundation of China( No.697760 37) and Research Foundation of Education Dep
关键词
硅微谐振器
光激励
振幅
镀膜
Silicon microresonators
Optical excitation
Amplitude
