积分光荧光测试在三代微光像增强器光阴极制作中的应用

THE APPL ICATION OF INTEGRATING FL UORESCENCE TEST IN MANUFACTURING OF PHOTOCATHODE IN GEN.3 LOW-LIGHT-LEVEL IMAGE INTENSIFIER

本文基于半导体材料积分光荧光测试的原理 ,叙述在三代微光像增强器光阴极组件制作工艺过程中光荧光强度的变化规律及其测试结果 ,对其作出理论解释 ,并且说明如何依此规律对工艺过程进行监控。

The change law and measured results of flourescence intensity in the manufacturing process of photo- cathode module of Gen.3low- light level image intensifier are described on the basis of integrating flourenscence test principle of semiconductor material.