仅使用偏振片精确测量偏振态

Polarization measurement with polarizer only

提出仅使用偏振片进行偏振态精确测量的方法,相对传统偏振态测量方法,本方法所需装置简单、操作简便,且不仅可以测量一束光的整体偏振态,还可以测量光束截面的偏振态分布。通过旋转1片偏振片,测量透射光强,测量除圆偏振光和自然光以外的任何种类偏振光。如需区分圆偏振光和自然光,则需增加1片非理想偏振片于第一片偏振片之前,此时圆偏振光经过非理想偏振片变成椭圆偏振光,而自然光变成部分偏振光,然后重复上诉方法即可区分椭圆偏振光和部分偏振光。这种测量偏振态的方法非常适用于光刻系统中,不仅节省光刻系统中偏振检测系统的成本,也提高检测精度和实用性。

Polarization measurement with polarizer only is presented. Compared with the traditional polarization measurements, this method needs less equipment and can measure the polarization state and polarization distribute of plane wave. Through rotating one polarizer it can measure all kinds of polarization state, except circularly polarized light and natural light. Another low extinction coefficient polarizer is set before the first polarizer, then the circularly polarized light converts to elliptically polarized light, and natural light converts to partially polarized light. Therefore these two exceptions can be distinguished. This method is very applicable in lithography system with less cost and more accuracy and practicability.