硅压阻式压力传感器智能校准系统设计

Intelligent Calibration System Design of Silicon Piezoresistive Pressure Sensor

针对硅压阻式压力传感器存在非线性和温度漂移的现象,设计了一种传感器线性化与温度补偿的智能校准系统。系统由上位机、下位机两部分组成,上、下位机通过RS485接口通信。下位机选用C8051F350作为主控制器,实现压力和温度的采集、处理及传输。上位机应用软件使用LabVIEW编写,实现规范化多项式拟合算法。试验表明该系统能够满足硅压阻式压力传感器线性化和温度补偿的要求。

Aiming at nonlinear and temperature drift phenomena of silicon piezoresistive pressure sensor,the intelligent sensor calibration system is designed for linearization and temperature compensation.The system was composed of upper computer and lower computer,upper and lower computer communicated with each other with the RS-485 bus.The lower computer system chose C8051 F350 as the main controller,to achieve the acquisition,processing and transmission of pressure and temperature.PC application software was written in LabVIEW,to achieve standardization polynomial fitting algorithm.Experiment shows that the system can meet the calibration requirements of silicon piezoresistive pressure sensor.