阳极氧化法制备透明氧化铝薄膜的研究

Study on Preparation of Transparent Alumina Film with Anodic Oxidation Process

以铝箔为阳极,石墨为阴极,草酸为电解液,采用二次阳极氧化法制备透明氧化铝薄膜。采用金相显微镜观察一次阳极氧化和二次阳极氧化后氧化铝薄膜的表面形貌,并用X射线衍射仪对氧化铝薄膜结构进行表征。结果表明,二次阳极氧化工艺对氧化铝薄膜的质量有重要的影响。采用退火-除油-浸蚀-电化学抛光-一次阳极氧化-二次阳极氧化工艺,并严格控制工艺参数,可以制备结构良好的透明氧化铝薄膜,且氧化铝薄膜是非晶态结构。

Transparent alumina films were prepared by two - step anodic oxidation method, with aluminum foil as anode, graphite as cathode, and oxalic acid as the electrolyte. The surface morphology of alumina film was analyzed by optical microscopy after first and second anodic oxidation, and the structure of alumina film was characterized by X ray diffraction. The results showed that the quality of alumina film was influenced strongly by two - step anodie oxidation process. Alumina film with high quality could be prepared with annealing - oil removal - etching - electrochemical polishing- first anodic oxidation- second anodic oxidation process and the process parameters controlled strictly, and the alumina film was amorphous structure.