C语言在椭圆偏振测厚技术计算中的应用

C Program Applied to Ellipsometry

依据椭圆偏振法测定透明薄膜的有关数据 ,运用C程序语言 ,通过迭代程序设计 ,由计算机同时计算出薄膜厚度和折射率 结果表明 :薄膜折射率和厚度的测定误差分别小于 0 .2 %和 1nm 并克服了TP - 77型椭偏仪只能用于n≤ 2 .6透明材料测定的限制 ,实现了对诸如多晶硅等薄膜厚度和折射率的精确测定 。

In accordance with the correlative data of a transparent thin film determined by ellipsometry,the thickness and the refractive index of a transparent thin film are calculated simultaneously by the computational C program designed by iterative programming.The results show that the experimental errors of the refractive index and thickness of the thin films are less than 0.2% and 1 nm respectively.The program overcomes the limitations of the Ellipsometer (TP-77) only applied to the transparent materials of n≤2.6 and realizes the accurate measurement of the thickness and refractive index of the thin films (for example,the thin polysilicon films),which has realistic significance for the investigation and exploitation of the thin films of high refractive index.