半导体硅电火花成形持续加工条件研究

Study on Continuous Processing Conditions for Monocrystalline Silicon EDM

采用紫铜电极进行半导体硅电火花成形加工时,加工表面经常会生成黑点物质,导致加工无法进行。分析表明,该黑点物质为不具有导电性的铜氧化物。为避免该物质的产生,首先通过选用石墨电极改变电极材料,并选用不含有氧元素的工作介质,杜绝非导电金属氧化物形成的条件;其次,通过增加电极的附加振动或旋转,使极间的洗涤、冷却能力增强,改善了极间的排屑条件,从而使半导体硅电火花成形加工得以稳定顺利地进行。

During forming monocrystalline silicon with copper electrode by EDM,the black spots generated on the machining surface,and the process was forced to stop. The analysis shows that the black spots are of copper oxide without electroconductibility. In order to avoid the generating of black spots,graphite electrode is adopted to change the electrode material and choose working fluid containing oxygen as little as possible. This way is not good for generating the metal oxide without electroconductibility. On the other hand,the vibration or the rotation of electrode are added to improve the conditions of washing,cooling and chip removing between the electrodes,the electric spark forming of monocrystalline silicon can run stably with these mentioned methods above.