气体静压节流器高准确度气压源的研制

The Design of Stable Pressure Source with High Accuracy for Aerostatic Restrictor

高压气体润滑方式在超精密领域得到了广泛应用。传统的气压源存在供气量少或稳定性差的缺点，难以满足当前气体静压节流器所需的高压力稳定度的气源要求，为此采用二级串联控制方法以及模糊PID算法设计了一种仪用高稳定度气压源系统。首先对该系统的软、硬件设计方案进行了简单介绍，其次对气压源整体性能进行了相关实验。实验结果表明：当气体流量在0～15L／min范围时，该系统可获得高稳定的气体压力，且相对误差小于1．14％。

The lubrication method of high pressure gas has been widely applied in in ultra-precision, l nereore, traditional pressure source can not satisfied with aerostatic restrictor because of its less gas-supply and poor stabili- ty. A stable pressure source with high accuracy for aerostatic restrictor using two series control scheme and fuzzy PID algorithm was designed. The software and hardware of stable pressure source are introduced. And the experi- mental results of overall performance of the gas source are analyzed. The results show that： The system can obtain a ideal stable gas pressure, and the relative error is less than 1. 14% when flow rate within the scope of 0 ~ 15 L/rain.