基于硫化物系的湿敏元件的研究

Study on the humidity sensors based on sulfide material

研究了Zn、Cd、Sb等系列硫化物薄膜湿敏元件的感湿特性 ,发现金属硫化物元件具有较好的湿敏特性和稳定性 ,对元件的频率特性、湿滞特性、响应 -恢复时间、阻抗、以及稳定性进行了测试 。

The sensitive properties of humidity sensors based on ZnS, CdS, Sb 2S 3,Sb 2S 5 sulfide materials have been studied. We found that the humidity sensors have excellent sensitivity and stability to relative humidity changing from 11% to 95%. The other properties of humidity sensors, such as frequency characteristic, stability characteristic, response-recovery time, complex impedance plots and humidity hysteresis have also been researched. The sensitive mechanism to humidity is discussed, too.