基于激光干涉仪的角度测量技术

An angle measurement technology besed on laser interferometer

介绍了一种基于激光干涉技术的精密角度测量系统 ,该系统利用干涉仪在几何量测量中的干涉测量技术 ,以激光作为干涉光源 ,迈克尔逊干涉仪作为干涉测量装置 ,通过角度转换装置将角度量转换为可以反映干涉光路中光程差变化的线位移量 ,由此引起干涉条纹的变化 ,再通过相应电路对干涉条纹进行一系列处理 ,从而实现了对大转角的精密测量。与以往类似系统相比 ,该系统具有结构简单、误差恒定、测量精度高、测角范围大。

A precise angle measurement system that takes advantage of Malchlson interferometer technology used in geometrical sense measurement is presented in this article. By changing the angle displacement to line displacement and using special circuits, an exact angle measurement system for big angle has been realized. This system has several merits such as high measurement precision, wide angle range and high digitalization compared with other similar systems. The principle of the system and the matters needing attention when designing this system are presented, the precision analysis about the system is presented also.