微机械加工硅电容式加速度传感器

A silicon capacitive acceleration sensor made in micromachining technology

介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器 ,它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为 2 0 gn,线性度为 10 -4

The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10 -4 magnitude is reached under a range of 20*#g n .