离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering

采用90°离轴磁控溅射法，在MgAl2O4（001）单晶基片上自组装生长了Pb（Zr0.52Ti0.48）O3-NiFe2O4（PZT—NFO）复合磁电薄膜，并研究了基片温度、氩氧比和溅射功率等因素对薄膜结构和性能的影响。结果表明，适合生长PZT-NFO薄膜的条件为基片温度800℃，氩氧比1：1，溅射功率160W。XRD测试显示，PZT-NFO薄膜为外延生长薄膜，且PZT相与NFO相之间的垂直晶格失配非常小。AFM和SEM结构观察表明，薄膜具有清晰的1-3维纳米复合结构，铁磁相NFO纳米柱直径约为80～150nm。降低氩氧比有助于NFO相的形成，但溅射功率过大会造成1-3维结构向无规则0-3维结构转变。磁性能测量表明纳米复合薄膜的饱和磁化强度在120～160kA／m之间，低于块体的NFO相，可能是由于两相的界面扩散所造成。

Self-assembled nanocomposite Pb（Zr0.52Ti0.48）O3-NiFe204 films were prepared on the （001）-oriented MgA1204 substrates by a 90° off-axis magnetron sputtering method. The influences of substrate temperature, argon over oxygen ratio and sputtering power on the structure and properties of PZT-NFO nanocomposite films were studied. The optimal growth conditions are substrate temperature of 800 ℃, argon over oxygen ratio of 1：1 and sputtering power of 160 W. XRD studies reveal that the PZT-NFO film is epitaxial along both the in-plane and out-of-plane directions, and the vertical lattice mismatch between the PZT phase and the NFO phase is very small. AFM and SEM analysis show that the PZT-NFO films have clear 1-3 dimensional nanocomposite structure, and the diameter ofNFO nanorods is 80-150 nm. Further decreasing argon over oxygen ratio is beneficial for the formation of NFO. However, increasing RF power causes a transition from an 1-3 dimensional nanocomposite to a 0-3 dimensional chaotic structure. Magnetic measurement shows that the saturation magneti- zation of NFO phase is 120-160 kA/m, lower than that of bulk NFO phase, possibly due to the interracial diffusion between the NFO and the PZT phases.