4Cr13不锈钢表面镀TiN薄膜组织结构及性能的研究

Investigation on Microstructure and Property of TiN Film Deposited on the Surface of 4Cr13 Stainless Steel

采用多弧离子镀技术在4Cr13不锈钢上沉积TiN薄膜,在其他参数不变的条件下,研究不同弧电流下薄膜的组织、结构及性能。利用扫描电子显微镜、X射线衍射仪、显微硬度计、划痕仪和往复式摩擦磨损仪分别对薄膜进行表面形貌观察,物相分析,以及表面硬度、结合力、耐磨性检测。实验结果表明:弧电流对薄膜的表面形貌有明显的影响,随着弧电流的增大,薄膜表面的液滴数目和尺寸逐步增大;薄膜的相结构主要由TiN相组成,在(111)面有较强的择优取向,且随着弧电流的增大,衍射峰强度略有增加;随着弧电流的增大,薄膜的硬度先增大后减小,硬度值最大为2897HV;随着弧电流的增大,薄膜的结合力先增大后减小,当弧电流为105A时,薄膜的结合力最大,为75N;随着弧电流的增大,薄膜的摩擦系数先减小后增大,当弧电流为105A时,薄膜的耐磨性最好。

TiN films were deposited on 4Cr13 martensitic stainless steel by multi-arc ion plating （MAIP） when the other parameters were fixed. The effects of currents of target applied to the substrate on the structure micro-hard- ness and adhesion strength of the films were studied. The surface morphologies of TiN films were investigated by SEM, the phase structures were investigated by XRD, the micro-hardness of coatings were investigated by hardness instrument. The results show that the number and size of large particles in the film increased when the currents of tar- get increased; the phase structure mainly composed of TiN phase, the film tend to （111） preferred; the micro-hard- ness of film increased at first then decreased as the currents of target increased, the maximum hardness values was 2897HV; the adhesion strength of the films increased at first then decreased as the currents of target increased, when the currents of target was 105 A,the maximum adhesion strength of the films was 75 N; the coefficient of friction of the film decreased at first then increased, when the currents of target was 105 A, the TiN film shows excellent wear resistance.