真空夹具系统的设计

Novel Type of Fixture Clamping by Negative Pressure

脆薄零件在加工中影响零件加工精度的主要问题是工件变形。在实际生产过程中,为了保证脆薄零件的加工精度,采用真空夹具来夹紧。真空夹具可以平稳、可靠地夹紧工件,且不易损坏所吸取工件的表面。本文根据实验室所需加工脆薄玻璃零件的加工要求来设计真空工作台系统。介绍了真空吸附的工作原理,描述了气路设计方案、真空吸盘的设计及具体气路的结构设计。

A novel type of the quick grip, or frxture, has been successfully developed to safely and reliablyclamp some thin, fragile work-pieces, including silicon, ceramics, and glass, in machining or fabricating delicate partswith nano-stmcture in a clean-room of a laboratory. The test results show that the fixture is capable of rapidly attracting and firmly holding a work-piece because of a negative pressure. The impacts of the clamping conditions, such as the pressure difference, mechanical strength, quality of constituent parts, and control unit, etc., on the clamping were evaluated to optimize design of its structure and its dedicated vacuum system. The technical advantages include an easy operation, quick exchange of work-piece, reliable holding and releasing samples without damage its surfaces, and high fabrication precision.