非对称耦合微环谐振腔灵敏度的理论研究

Theoretical study on sensitivity of asymmetrically coupled microring resonator

为实现高灵敏度微环谐振腔传感器,开展了光波导模式的理论研究。根据微环谐振腔的输出光强随有效折射率变化的规律,分析了耦合因子和衰减因子对非对称耦合微环谐振腔灵敏度的影响,以及波导间距与交叉耦合因子的关系,确立了波导间距与器件灵敏度的对应关系。仿真优化结果表明,当衰减因子为0.99,自耦合系数为0.953 5,波导间距为0.13μm时,器件灵敏度的归一化最大灵敏度可达0.879。研究结果可为高灵敏度双直波导微环谐振腔的实现提供理论依据。

In order to realize high sensitivity microring resonator sensor, the coupled mode theory of the waveguides was studied. The influences of coupling coefficients and attenuation factors on the sensitivity of asymmetrically coupled microring resonator are analyzed based on the fact that micror-ing resonator＆#39;s light intensity changes with the effective refractive index. The relationship between the waveguide gap and the cross-coupling coefficient was analyzed and that between the waveguide gap and the device sensitivity is established. The optimizied simulation results show that the normal-ized maximum value of thedevice sensitivity can reach 0.879 when attenuation factor is 0.99 , self-coupling coefficient 0.953 5, and waveguide gap 0.13 μm, respectively. The research results pro-vide the theoretical basis for the realization of high sensitivity microring resonator with double straight waveguides.