真空密封中O型圈和燕尾槽的使用研究

Research of O-Ring and Dovetail Groove in the Seal of Vacuum Cavum

为了研究真空腔体环境中O型圈和燕尾槽结构的密封性能和密封作用面位置,首先介绍了O型圈在腔体密封中的广泛使用的现状,以及在MOCVD设备中的使用,接着介绍O型圈密封机理和失效准则,最后使用SolidWorks商用软件对其进行建模分析。文章最后验证O型圈和燕尾槽结构的密封作用面位置能够起到良好密封作用,并且密封作用面为法兰上下面,为加工密封法兰提供指导。

For the sake of probing into the sealing performance and sealing effect of the structure of O-ring with dovetail groove in the environment of the vacuum cavum, this paper firstly introduces the actuality that O-ring is broadly used in MOCVD sealed cavity. Secondly it describes the O-ring＇s seal mechanism and failure criteria. Finally, models and analysis on O-ring and dovetail groove by utilizing the commercial software SolidWorks. In the end, it is concluded that the O-ring and dovetail groove structure can play a good sealing effect, and the effective sealing interfaces is the upper and under faces of flanges. This conclusion provides some guidance for processing the sealing flanges.