摘要
采用溶胶-凝胶浸渍法制备了V_2O_3凝胶薄膜,利用XPS及AES分析了不同条件下热处理得到的薄膜的表面成分。实验证明在真空6.67Pa下400℃至500℃热处理2h,得到了具有热诱导可逆相转变效应的VO_2薄膜,相转变后近红外区域内薄膜的透过率明显降低,分析了热处理制度与相转变之间的关系。
VO_2 thin films have been prepared by the sol-gel dip-coating method, and surface analyses of thin films obtained in heat treatment for different conditions are perform-ed using XPS and AES techniques. The experim ental results show that VO_2 thin films with thermally-induced reversible phase transformation are obtained in heat treatment at 400℃ to 500℃ for 2 h under the vacuum condition(6.67Pa), and the near IR transmittance decreases obviously after phase transformation (about 30％).The relation-ship between phase tramsformation and heat treatment condition is analyzed.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
1991年第2期142-146,共5页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金资助
关键词
氧化钒
凝胶薄膜
薄膜
相转变
vanadium oxide
sol-gel method
thin film
XPS
AES
phase transformation
