基于ModelCenter的精密气浮工件台系统建模与参数优化

System Modeling and Parameters Optimization of Ultra- precision Stage Based on ModelCenter

针对精密气浮工件台运动时部件会不可避免地产生偏转和振动,建立了精密气浮工件台的系统模型,包括工件台几何模型,直线电机模型,气体轴承模型。在设定工况下对工件台系统的动态特性进行了数值仿真分析,得到了工件台系统的运动偏转误差曲线和气膜的垂向振动曲线,为工件台系统的设计提供了重要的理论参考价值。基于多学科协同设计集成优化平台ModelCenter进行系统集成,并建立了精密气浮工件台的多学科设计优化模型。利用遗传算法实现了精密气浮工件台的总体参数优化设计,优化结果满足设计要求。

As the deflection and vibration of the moving components are inevitably incurred in ultra-precision stages, System model of ultra-precision stage was established, including geometry, linear motor and gas-lu- bricated bearing. The dynamic characteristic of the stage was analyzed through an numerical simulation . Meanwhile, the deflection and vibration evaluation were achieved under given condition, which helped to provide a theoretical reference value for the stage in design. System model of the ultra-precision stage was in- tegrated based on Modelcenter. Optimization model was also established and parameter optimization design of ultra-precision stage was carried on using genetic algorithm. The optimization results meet the design re- quirement.