摘要
介绍了一种电容测微仪的无基准校正方法 ,并就其工作原理进行了讨论。采用这种方法不需要其他高准确度基准 ,仅利用两相同准确度的电容传感器和无基准校正装置即可进行多次相互校准 ,最终得到各自准确度达到自身能力极限的校正结果。
A standardless-calibration method are proposed for calibrating precision measurement system of capacitance transducers with nanometer resolution and the basic characteristics of the method are discussed. Without any special standard, the linearity errors of a pair of capacitance transducers can be calibrated themselves within their performance limitations.
出处
《宇航计测技术》
CSCD
2000年第6期19-23,共5页
Journal of Astronautic Metrology and Measurement
基金
国家自然科学基金重点资助项目!资助号 :5 9735 12 0
