光纤法布里-珀罗微压传感器

A Fiber Fabry-Perot Micro Pressure Sensor

设计并研制了一种新型光纤法布里珀罗压力传感器，通过光刻、硅片刻蚀、阳极键合等微机电系统技术制作而成，适合恶劣环境下、狭小空间内的微压环境压力测量。详细阐述了传感器的结构设计和制作方式。该设计巧妙地利用了光纤法兰盘，保证了光纤端面与敏感膜的平行，从而形成高质量的法布里珀罗干涉腔。该结构也有利于初始腔长的稳定，减小了传感器误差。建立了实验解调系统，对其压力、温度等特性进行了详细的测试。实验结果表明，在0-0.1 MPa的压力范围内，传感器线性度好，重复性高，灵敏度达到了61.6 μm/MPa。

A novel fiber Fabry-Perot pressure sensor is presented, which is fabricated by photoetching, silicon etching, anodic bonding and other micro-electromechanical system technologies. It is suitable for micro-pressure measurement in harsh environments and confined spaces. The structure of the sensor and the production methods are elaborated. In this structure, with the help of fiber flange, the end face of fiber can be in parallel with sensitive membrane, thus a high quality Fabry-Perot interferometer cavity is formed. The structure is also conducive to the stability of the initial cavity length, reducing the sensor′s error. The demodulation system for the testing of pressure characteristics and temperature property is set up. Experimental results demonstrate that a high linear response in the range of 0 to 0.1 MPa is obtained in this sensor. The repeatability is good and the sensitivity reaches 61.6 μm/MPa.