摘要
This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure （ICP）. The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis （FEA） tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems （MEMS） process. The test results yield sensitivities of 1.033x 10-2 mV/kPa for the childhood type detection and 1.257x 10-2 mV/kPa for the adult detection with sensor chip sizes of 0.40x0.40 mm2 and 0.50x0.50 mm2, respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore, relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure （MDP） reaches 128.4 Pa in average.
This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure （ICP）. The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis （FEA） tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems （MEMS） process. The test results yield sensitivities of 1.033x 10-2 mV/kPa for the childhood type detection and 1.257x 10-2 mV/kPa for the adult detection with sensor chip sizes of 0.40x0.40 mm2 and 0.50x0.50 mm2, respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore, relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure （MDP） reaches 128.4 Pa in average.
基金
supported by the National Natural Science Foundation of China (Nos. 61025021 and 61020106006)
the National Key Projects of Science and Technology of China (No. 2011ZX02403-002)
