摘要
ZrN/Zr-N/Zr coatings were deposited on H13 steel by close field unbalanced magnetron sputtering ion plating （CFUBMSIP） technique. The effect of two main parameters such as OEM and bias voltage for the CFUBMSIP process on the microstructure, mechanical properties and impact fatigue behavior of the coatings was investigated. The results indicate that with OEM increasing from 55% to 65% the surface particles size of the coatings increases while it remains almost similar when the bias voltage changes from 60 to 75 V. An aggregation of the particles occurs on the coatings surface, with further increasing the OEM and bias voltage to 75% and 90 V, respectively. The coatings show a columnar grain structure and are mainly composed of two phases of ZrN and Zr. The coating hardness decreases with OEM value increasing and both the coating hardness and modulus go up with bias voltage. The coating deposited under OEM of 65% and bias voltage of 75 V shows the best impact fatigue property.
ZrN/Zr-N/Zr coatings were deposited on H13 steel by close field unbalanced magnetron sputtering ion plating （CFUBMSIP） technique. The effect of two main parameters such as OEM and bias voltage for the CFUBMSIP process on the microstructure, mechanical properties and impact fatigue behavior of the coatings was investigated. The results indicate that with OEM increasing from 55% to 65% the surface particles size of the coatings increases while it remains almost similar when the bias voltage changes from 60 to 75 V. An aggregation of the particles occurs on the coatings surface, with further increasing the OEM and bias voltage to 75% and 90 V, respectively. The coatings show a columnar grain structure and are mainly composed of two phases of ZrN and Zr. The coating hardness decreases with OEM value increasing and both the coating hardness and modulus go up with bias voltage. The coating deposited under OEM of 65% and bias voltage of 75 V shows the best impact fatigue property.
基金
Funded by the National Natural Science Foundation of China(No.50771070)
the Shanxi Province Science and Technology Key Project(No.20120321017-03)
