锌还原法制备多晶硅的热力学

Thermodynamics of zinc reduction process for production of polycrystalline silicon

对锌还原法过程进行了热力学分析,研究硅的产率与压强、温度以及物料配比的关系,并给出硅的产率随着压强、温度和物料配比的变化图,确定该生产过程中主要副反应。最后确定锌还原法的最佳操作条件为温度控制在1 200 K左右、常压、物料配比n(Zn)/n(SiCl4)=3。在此条件下,硅的理论产率为86.6%。

The thermodynamics of zinc reduction process was studied. The relationships among silicon productivity and pressure, temperature and molar ration of reactant were investigated and the diagrams of silicon productivity for different pressures, temperatures and molar ratios of reactants were plotted. Furthermore, the major side-reactions which affect the productive ratio of silicon are decided. Finally, the optimum operation of the reactor is decided. The optimum conditions are as temperature of about 1 200 K, atmospheric pressure and the molar ratio of reactants （n（Zn）/n（SiCl4）） as 3. The silicon theoretical yield is 86.6%under this condition.