摘要
设计一种基于低温共烧陶瓷(LTCC)的无线无源压力传感器。电感器和电容器并联组成的LC谐振回路构成传感器的工作电路,采用厚膜工艺完成了平面螺旋电感器和平行板电容器的制备。传感器利用LC谐振回路的谐振频率对不同压力的响应来表征传感器的应变特性,采用2个电感耦合的方式来实现无线检测。测试结果显示:传感器的谐振频率随外加压力的增大而减小,其谐振频率变化对压力的响应灵敏度约为331.70 kHz/bar。
A wireless passive pressure sensor based on low temperature co-fired ceramic （LTCC） is designed. The working circuit of sensor is composed of a LC resonant circuit ,which consists of an inductor and a capacitor in parallel, and a planar spiral inductor and a parallel plate capacitor is fabricated by thick-film process. The strain characteristic of the sensor is based on the response of resonance frequency of the LC circuit to the applied pressure, and wireless detection is realized by electromagnetic coupling with two inductances. Test results show that the resonance frequency of sensor decreases with the increase of pressure, and response sensitivity of the resonance frequency to pressure is about 331.70 kHz/bar.
出处
《传感器与微系统》
CSCD
北大核心
2014年第5期69-72,共4页
Transducer and Microsystem Technologies
基金
国家"973"计划前期资助项目(2010CB334700)
关键词
低温共烧陶瓷
无线无源
无线检测
平面螺旋电感
平行板电容器
low temperature co-fired ceramic （LTCC）
wireless passive
wireless detection
planar spiralinductor
parallel plate capacitor
