电子浴辅助阴极电弧源法合成AlN薄膜机理初探

Initial Mechanism Discuss on Synthesis of AlN Thin Film by Activated Reactive Ion Plating with Cathode Arc Source Assisted by Electrons Bath

研究了电子浴辅助阴极电弧源法合成 Al N薄膜的形核生长过程 。

The nucleation and growth process of AlN thin film synthesized by activated reactive ion plating with cathode arc source assisted by electrons bath was researched.At the same time,the growth mechanism of AlN thin film was initially discussed.