多元超硬膜(Ti,Al,V)N的制备及性能研究

Study on Manufacture and Properties of the Multi -components Super Hard(Ti,Al,V)N Films

采用多弧离子镀方法 ,以 Ti6 Al4V作为蒸发材料 ,N2 为反应气 ,在高速钢、玻璃及单晶 Si基体上沉积 ( Ti,Al,V) N多元超硬膜。结果表明 ,该镀膜工艺可行 ,制备出的 ( Ti,Al,V)

Super hard (Ti,Al,V)N thin film is prepared on high speed steel,glass plate,single crystal silicon membrane substrate with Ti 6Al 4V target and N 2 gas by multi arc ion plating.The results show that the deposition technology is feasible and that properties of the (Ti,Al,V) N films are excellent.