台式多功能声显微镜的研制

DEVELOPMENT OF A TABLE MULTIPURPOSE SCANNING ACOUSTIC MICROSCOPE

研制成功了一台 THSAM- M型台式多功能声显微镜。在 PC机内插入采样速率为1 0 9次 /s的超高速 A/D卡以及快脉冲产生和接收卡 ,利用软件完成信号检测和显示功能。仪器工作频率为 1～ 1 0 0 MHz;在检测样品时 ,可同时显示 A,B,C扫描结果 ,并可观察样品的多层 B,C扫描图象 ,还可显示样品的内部三维结构。该系统已成功应用于多个领域的样品测量 ,获得了一定效果。该机体积小、功能强、成本较低 ,具有广阔的应用前景。

THSAM M multipurpose scanning acoustic microscope was developed. A super high speed A/D converter card, of which the sampling rate is over 10 9 samples/s, and a fast pulse generator/signal receiver card were inserted in PC slots. The functions of the system, including testing, processing and display, were realized by software. The operation frequency range was 1 to 100MHz. The A, B and C scans could be accomplished at the same time and their real time results were displayed on the screen of PC terminal. When test was over, multi layer B and C scans and 3D image could be observed from the obtained data. The system was successfully applied in many fields and useful results were obtained.