Diffusion process for efficiency improvement with high sheet resistance on traditional production lines of solar cell

By optimizing the diffusion temperature and time,four groups of samples with different sheet resistances are achieved.The front screen printing pattern and firing temperature are fine-tuned according to the needs.The performance of the low-and-plateau-temperature doping recipe(as recipe A)is better than that of the low-and-multiple-temperature doping recipe(as recipe B).And the 19.24%efficiency of volume production of monocrystalline solar cells with 238.95 mm2 and 80?/sq sheet resistance is obtained in the traditional process line.0.48%more efficiency is achieved than 60?/sq due to the reduction of the phosphorus surface doping and shallow junction by the low-and-plateau-temperature diffusion recipe.The module test shows that by using two drive-in zones,not only do we have a higher efficiency,but also have a stabler and lower power loss in encapsulation manufacture.It is showed that power of a large improvement will be gotten by statistical analysis and PC1D simulation.