高g_n值悬臂梁式硅微加速度传感器的结构设计

Structure Design of High g_n-Force Cantilever Beam Silicon Piezoresistive Accelerometers

针对高冲击加速度测量 ,分别就硅微加速度传感器等截面和变截面悬臂梁在不同结构尺寸下的应力状况及固有频率进行了有限元数值模拟 ;对等截面和变截面悬臂梁结构的灵敏度进行了分析比较和数值计算 ,结果都说明了采用变截面悬臂梁结构 ,灵敏度可提高近 30 % ;对选择的变截面悬臂梁结构的加速度传感器其量程为 1 0 0 0 0gn,有足够的抗过载能力 ,且横向灵敏度足够小 .

Using FEM numerical simulation, the stress distribution and resonance frequency are presented for different structure dimensions to equal cross section and non equal cross section cantilever beam of silicon piezoresistive accelerometers. Analysis and numerical calculation of sensitivity to equal cross section and non equal section cantilever beam are completed, the results show that the sensitivity of non equal cross section cantilever beam can be improved about 30 percent. To optimized structural dimensions of cantilever beam, the range of acceleration is greater than 10?000? g n, lateral sensitivity can be neglected, over load ability is satisfactory.