直线驱动工作台系统中摩擦扰动补偿器设计

Nonlinear friction compensation in PMLSM table drive servo system

由于直线驱动的工作台滑动面存在着接触运动，所以滑动面之间不可避免地存在着非线性 摩擦．它严重影响着高精度微进给的特性．通过设计扰动观测器补偿非静态摩擦．用其补偿摩擦对 系统的影响，可以得到精确的速度／位置控制，并且没有由于速度转换时的零速度间隔．

Contact motion exists in PMLSM table drive systems, so among the sliding surface of the table there must be nonlinear friction. This paper presents a disturbance-observer compensating the nonlinear friction. Using the observer, the precise velocity/position control can be achieved, and zero velocity interval at the velocity reversal does not exist.