低温共烧陶瓷翘曲度改进工艺研究

Process Improvement of Camber of Low Temperature Co-fired Ceramic

提出了一种改进低温共烧陶瓷基板翘曲度的工艺方法。根据对实际工艺过程的观察及相关理论分析，发现烧结时承烧板的表面状态是影响基板翘曲度的关键因素之一，据此提出相应的改进方案，采用新型承烧板替代原有的承烧板进行烧结工艺，基板翘曲度得到了较大的改善，所烧结基板的起伏由原先的150～250μm，改善到80～110μm，较好地满足了后续微组装工艺的使用要求。

A method of improving substrate camber of low temperature co-fired ceramic is proposed. On the basis of practical product process and theory analysis, the state of setter surface is found to be a key factor affecting substrate camber. In co-fired processing, using a new setter instead of an old one can obviously improve substrates camber. The camber of substrate is decreased from 150-250μm to 80-110 μm, and this major improvement assures that the substrate can better satisfy the needs of next micro-assembly process.