摘要
随着科学技术的发展,各种类型真空传感器在真空测量设备中得到广泛应用,日常测量和校准问题也日益得到相关计量部门的关注。通过对压阻式真空传感器使用原理的分析,采用比较法真空校准装置,获得真空变量与测量输出信号间的函数关系,对照测量误差是否在准确度等级范围内,准确判断测量结果与被测量真值的一致程度,解决该类型真空传感器的测量和校准问题。
With the progress of science and technology, all kinds of vacuum sensor is widely used in the vacuum measuring equipment. The related measurement departments pay more and more attention to its routine measurement and calibration problem. Through the analysis of the principle of the vacuum piezoresistive vacuum sensor, use the comparison method of vacuum calibration device to obtain the function relation between the pressure variables and output signal, judgment measurement results and the measures degree of truth value consensus, the problem of measurement and traxeability of the sensor is solved.
出处
《真空与低温》
2014年第2期94-97,共4页
Vacuum and Cryogenics
关键词
真空传感器
测量误差
准确度等级
惠斯登电桥
vacuum sensor
measurement error
the accuracy level, Wheatstone bridge
