摘要
The tensile strained Ge/SiGe multiple quantum wells(MQWs) grown on a silicon-on-insulator(SOI) substrate were fabricated successfully by ultra-high chemical vapor deposition.Room temperature direct band photoluminescence from Ge quantum wells on SOI substrate is strongly modulated by Fabry-Perot cavity formed between the surface of Ge and the interface of buried SiO2.The photoluminescence peak intensity at 1.58 μm is enhanced by about 21 times compared with that from the Ge/SiGe quantum wells on Si substrate,and the full width at half maximum(FWHM) is significantly reduced.It is suggested that tensile strained Ge/SiGe multiple quantum wells are one of the promising materials for Si-based microcavity light emitting devices.
The tensile strained Ge/SiGe multiple quantum wells (MQWs) grown on a silicon-on-insulator (SOI) substrate were fabricated successfully by ultra-high chemical vapor deposition. Room temperature direct band photoluminescence from Ge quantum wells on SOI substrate is strongly modulated by Fabry-Perot cavity formed between the surface of Ge and the interface of buried SiO2. The photoluminescence peak intensity at 1.58 μm is enhanced by about 21 times compared with that from the Ge/SiGe quantum wells on Si substrate, and the full width at half maximum (FWHM) is significantly reduced. It is suggested that tensile strained Ge/SiGe multiple quantum wells are one of the promising materials for Si-based microcavity lijzht emitting devices.
基金
supported by the National Natural Science Foundation of China(Nos.61036003 and 61176092)
the Ph.D.Programs Foundation of Ministry of Education of China(No.20110121110025)
关键词
多量子阱
光致发光
拉伸应变
硅绝缘体
谐振腔增强型
硅锗
SOI衬底
SiGe
Cavity resonators
Chemical vapor deposition
Germanium
Interfaces (materials)
Photoluminescence
Silicon
Silicon on insulator technology
Substrates