射频磁控溅射法制备含银类钻碳薄膜的结构与性能

Microstructures and properties of Ag-DLC films prepared by magnetron reactive sputtering

为了明确银原子含量对含银的类钻碳类(diamond like carbon,DLC)薄膜抗菌率和薄膜性能的影响,改变溅射功率,采用射频磁控溅射法在玻璃基底上制备一系列不同Ag含量(原子分数,下同)的Ag-DLC薄膜。通过扫描电镜、拉曼光谱分析仪、透射电镜、X射线衍射仪、原子力显微镜等手段,研究Ag-DLC薄膜的C键结形态以及等对薄膜的特性与抗菌率等。结果表明,随溅射功率增加,薄膜厚度、薄膜中Ag含量以及D峰与G峰的积分强度比值ID/IG都增加。并且薄膜表面逐渐变得粗糙,薄膜的硬度和电阻率均下降。生物特性上,随溅射功率增加,薄膜对大肠杆菌(E.coli)表现出更加优良的抗菌性能。当溅射功率为200 W时,薄膜中Ag的原子分数为19.77%,足以保证薄膜具有优良的抗菌性能,抗菌率达到98%。

To clarify the effects of silver （Ag） atom content on antibacterial rate and the performance of silver-containing diamond-like carbon （DLC） films, Ag-DLC films were deposited on the glass using magnetron reactive sputtering. The watt of input energy was applied as main process parameter to obtain 1～2μm thick films. The basic properties such as hardness, electric resistivity and surface roughness were evaluated by hardness tester, 4 points-probe resistivity tester and atomic force microscope （AFM）, respectively. The X-ray diffraction （XRD）, scanning electron microscope （SEM）, Raman spectroscope and transmission electron microscope （TEM） were used to examine the microstructures and bonding characteristic and growth morphologies of DLC films. Antibacterial test and contact angle test were undertaken to analyze the antibacterial ability of silver-containing DLC films. The results indicate that, with increasing the input power, the thickness, silver content, ID/IG of the films and surface roughness increase, while the hardness and electric resistivity decrease. Antibacterial tests show that, with increasing the input power, the antibacterial ability against E.coli increases. The antibacterial rate of 98%is obtained in the films with 19.77%（atom fraction） silver content when the input power is 200 W.