期刊文献+

柔性热膜剪应力传感器水下测量温度修正 被引量:5

Temperature correction of flexible thermal shear stress sensor for underwater measurements
下载PDF
导出
摘要 柔性热膜微传感器应用于流体壁面剪应力测量时,流体温度对传感器输出有很大影响,因此有必要对工作在非标定温度下的传感器输出信号进行修正补偿。重点研究了水下测量时传感器输出与水温的关系以及温度修正方法。通过分析传感器过热比和流体物理性质与温度的相关性,建立了流体温度与传感器过热比和标定系数的函数关系。在此基础上,提出了一种用于水下剪应力测量的温度修正方法,可以有效减小水温对传感器输出的影响。经实验验证,该方法可以使工作在25℃、28℃水温环境下的传感器输出值与其20℃标定值的相对误差从23.7%和37.1%回落到0.82%和0.83%。 The fluid temperature difference between practical operation and its original calibration procedure can cause an unacceptable error for micro thermal shear stress sensors.Thus,the temperature correction is necessary when the working water temperature is different from the original calibration temperature.By analyzing the temperature dependence of the overheat ratio and coefficients of the sensor's behavioral equation,a correction method is presented.Laminar flow experiments with changeable temperatures are carried out.The results show that the influ-ence of water temperature can be minimized,and the relative errors of sensor output at water temperature of 25℃ and 28℃ can be falling to 0.82% and 0.83% from 23.7% and 37.1%,respectively.
出处 《实验流体力学》 CAS CSCD 北大核心 2014年第2期39-44,共6页 Journal of Experiments in Fluid Mechanics
基金 国家重大科学仪器设备开发专项项目(2013YQ040911)
关键词 剪应力 柔性 热膜传感器 水下测量 温度修正 shear stress flexible thermal sensor underwater measurement temperature cor-rection
  • 相关文献

参考文献14

  • 1Xu Yong. A MEMS multi-sensor chip for gas flow sensing[J]. Sen- sors and Actuators, 2005, A121: 253-261.
  • 2Xu Yong. Flexible shear-stress sensor skin and its application to unmanned aerial vehicles[J]. Sensors and Actuators, 2003, A105: 321-329.
  • 3Ma B, Ren J, Deng J, et al. Flexible thermal sensor array on PI film substrate for underwater appiieations[C]//Miero Electro Mechanical Systems (MEMS), 23rd International Conference on IEEE, 2010:679-682.
  • 4Ren Jinzhong, Ma Binghe. Fully flexible hot film sensor array for underwater applications[C]. Proceedings of the 2010 5th IEEE International Conference on Nano/Miero Engineered and Molec- ular Systems, 2010: 178-181.
  • 5Ren Jinzhong. Fully flexible hot film sensor array for underwa- ter applications[C]. International Conference on Nano/Micro Engineered and Molecular Systems IEEE, 2010, 5th.
  • 6马炳和,赵建国,邓进军,苑伟政.全柔性热膜微传感器阵列制造工艺及性能优化[J].光学精密工程,2009,17(8):1971-1977. 被引量:9
  • 7Bremhorst K. Effect of fluid temperature on hot wire anemometers and an improved method of temperature compensation and lin- earization without use of small signal sensitivities[J]. Phys E: Sci Instrum, 1985, 18: 44-49.
  • 8Bowers C G, Willits D H, Bowen H D. Comparison of tempera- ture correction methods for hot wire anemometers[J]. Transac- tions of the ASABE, 1988, 31(5): 1552-1555.
  • 9马炳和,周保清,邓进军,苑伟政.MEMS微型热敏传感器的隔热结构及其性能分析[J].传感技术学报,2008,21(6):933-937. 被引量:10
  • 10King L V. On the convection of heat from small cylinders in a stream of fluid: determination of the convection constants of small platinum wires, with applications to hot-wire anemometry [J]. Proceedings of the Royal Society of London. Series A, 1914, 90(622): 563- 570.

二级参考文献20

  • 1肖素艳,车录锋,李昕欣,王跃林.基于柔性MEMS皮肤技术温度传感器阵列的研究[J].光学精密工程,2005,13(6):674-680. 被引量:22
  • 2HUANGJ B, JIANG FK, TAI YC. A micro-electro mechanical-system-based thermal shear- stress sensor with self-frequency compensation[J]. Meas. Sci. Technol., 1999,10(8):687-696.
  • 3HAUSMANN F, SCHRODER W. Coated hot-film sensors for transition detection in cruise flight[J]. Journal of Aircraft, 2006,43(2):456-465.
  • 4BERNS A, OBERMEIER E,WANG X H, et al.. AeroMEMS sensor with integrated pressure and hot wire sensor for high-frequency transition detection[C]. 47th AIAA Aerospace Sciences Meetings and Exhibit, Reston: AIAA, 2009:318-425.
  • 5NGO L, KUPKE K, SEIDEL H, et al.. Simulation and experimental results of a hot-film anemometer array on a flexible substrate[C]. Proceedings of CANEUS 2006, Reston: AIAA, 2004:6726- 6729.
  • 6SCHMID U, ABABNEH A, SEIDEL H, et al oxide thin films sputter-deposited on organic substrates[J], Microsyst Technol,2008, 14(4-5):483- 490.
  • 7XU Y, JIANG F K, SCOTT N, et al.. Flexible shear-stress sensor skin and its application to unmanned aerial vehicles[J]. Sensors and Actuators, 2003,105(3) :321-329.
  • 8XIAO S Y, CHE L F, LI X X, etal.. A cost-effective flexible MEMS technique for temperature sensing[J]. Microelectronics Journal, 2007,38(3) : 360-364.
  • 9HOFFMAN D W. Perspective on stress in magnetron thin films[J]. Journal of Vacuum Science & Technology, 1994,12(4):953-961.
  • 10THORNTON J A, HOFFMAN D W. Stress-related effects in thin films[J]. Thin Solid Films, 1989,171 (5) :5-31.

共引文献16

同被引文献21

引证文献5

二级引证文献12

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部