新型低电压大变形微驱动器数值求解及仿真

Numerical Analysis and Simulation of a Low-voltage Large-displacement Micro-actuator

针对横向加载单向变形MEMS静电微驱动器位移过小或驱动电压过大问题,提出一种基于纵横弯曲变形原理的硅基大位移低驱动电压静电驱动器模型;基于拉格朗日-麦克斯韦机电动分析力学,建立轴向横向同时加载的微驱动器动力方程;分析温度应力、静电调节力和轴向挤压力对轴向载荷的影响;基于龙格-库塔算法和有限差分法分别将横向分布载荷和轴向载荷等效转化为横向集中载荷;仿真得到变形同驱动电压、调节电压、轴向挤压量和温差的关系;结果显示当驱动电压仅为16 V时,位移高达10.861μm,远大于传统横向加载单向变形微驱动器的位移量.实验验证了仿真结果.

A silicon micro actuator model with large-displacement and low-voltage is presented based on principle of vertical- horizontal bending. Dynamic equation of micro actuator with axial and transverse loading is built based on Lagrange-Maxwell electromeehanieal analysis dynamics. Influence of temperature stress, axial electrostatic force and squeezing force are analyzed. Transverse distributed load and axial load are transformed equivalently into transverse centralized load with Runge-Kutta algorithm and finite difference method respectively. Relationships of deformation with driving voltage, regulation voltage, and axial compression quantity and temperature difference are simulated. It shows that displacement is as large as 10. 861 p,m as driving voltage is only 16 V. Displacement is much greater than that of existing micro actuators. Simulation results are verified by experiments.