晶圆厂设施布局规划研究

Research on Facilities Layout Planning of FAB

半导体制造是集技术、资金、人才于一体的行业,投资巨大,建设周期长。在半导体制造业中,由于对洁净室的环境要求高,半导体设备的昂贵、敏感性和工艺的复杂性,以及高昂的移机费用,增加了晶圆厂布局的难度与挑战,使得工厂的设施布局规划显得尤为重要。

Semiconductor manufacturing is an industry which needs the high technology, fund and talent, and also need huge investment and long construction period. In the semiconductor manufacturing industry, due to the strict requirements of clean room environment, expensive and sensitive semiconductor equipment, complex process, and high relocation costs, it is very difficult and facing big challenge of FAB layout, which leads to facilities layout planning become more and more important.