VO_2/FTO复合热致变色薄膜的制备及其光学特性

Preparation and optical properties of VO_2/ FTO thermochromic composite films

在掺氟的SnO2(FTO)导电玻璃衬底上采用直流磁控溅射的方法室温沉积纯钒金属薄膜,再在退火炉中经后退火工艺制备VO2/FTO复合热致变色薄膜,并对复合薄膜的结构及其光学特性进行研究.结果表明,导电玻璃上的FTO并没有改变VO2择优取向生长,但明显改变了VO2薄膜的表面形貌特征.与相同工艺条件下在玻璃衬底上制备的VO2薄膜相比,VO2/FTO复合薄膜的相变温度降低约18℃,热滞回线温宽收窄约4℃,相变前后的红外透过率分别约为42%和21%.说明复合薄膜既可明显降低相变温度和热滞宽度,又可增强VO2薄膜的红外调控能力.

The pure metal thin films were fabricated on the F doped SnO2 conductive glass（FTO） substrates by DC mag- netron sputtering at room temperature. Then the VOJFTO composite films were annealed in furnace. The structure and optical properties of the composite films were analyzed by instruments. Results show that FTO on the glass does not change the preferred orientation growth of VO2 thin films, but significantly change its surface morphology characteristics. Compared with the VO2 thin films that were prepared on glass substrates with the same process conditions, the phase transition temperature of the VO2/FTO composite films is decreased about 18 ℃, the width of thermal hysteresis is nar- rowed by about 4 ℃, and the infrared transmittances before and after phase transition are 42% and 21% respectively. It suggested that the composite films can reduce the phase transition temperature, limit the thermal hysteresis loop as well as enhance the infrared light modulation capabilities of VO2 thin films.