大尺寸ZnS真空气相沉积炉的研制

Development of vacuum chemical vapor deposition furnace for large size ZnS

介绍了CVD ZnS生产工艺、真空气相沉积炉技术性能、设备结构组成及特点。该真空气相沉积炉是制备大尺寸ZnS的关键设备,它生产的CVD ZnS板料尺寸达到了1800 mm(长)×800 mm(宽)×25 mm(厚),单炉产量为1000 kg,是国内生产ZnS板坯料尺寸最大、单炉产量最多的设备。

The CVD ZnS production process and technical performance,mechanical structural characteristics of the vacuum chemical vapor deposition furnace were introduced.The workpiece dimension is 1800 m m（length）×800 m m（width）×25 m m（thickness）,the output is 1000 kg per furnace.It is a key equipment for large size CVD ZnS production and also the largest furnace in domestic.