悬臂式压电双晶片振子夹持长度变化对其动态特性的影响

Effect of different clamping lengths of cantilever bimorph on its dynamic characteristics

以惯性压电驱动器的关键部件——悬臂式压电双晶片振子为研究对象,探讨了悬臂式压电双晶片振子的夹持长度变化对其动态特性的影响规律。首先,建立了悬臂式压电双晶片振子静态参数方程和动力学模型。然后,应用matlab软件仿真分析了夹持长度变化对悬臂式压电双晶片振子的端部位移幅值和惯性加速度幅值的影响。最后,分别测试了悬臂式压电双晶片振子在不同夹持长度下的端部位移幅值以及惯性加速度幅值。结果显示：驱动电压为10V,频率为11Hz,悬臂式压电双晶片振子的夹持长度在9～20mm内变化时,其端部位移幅值最大为66.2μm,产生的惯性加速度幅值最大为10.2ms-2。仿真和试验结果表明：激励电场相同时,随着悬臂式压电双晶片振子的夹持长度增大,其端部位移幅值会变小,而其产生的惯性加速度会变大。

This work focuses on the effect of clamping length on the dynamic characteristics of a cantilever piezoelectric bimorph vibrator.First,the static parameter equation and the dynamic model of the cantilever bimorph vibrator was established.Then,the effects of the changed clamping lengths on the tip displacement amplitude and the inertia acceleration magnitude of the cantilever bimorph vibrator were analyzed with MATLAB software.Finally,the tip displacement amplitude and the inertia acceleration amplitude of the cantilever bimorph vibrator were measured separately.Results show that the maximal amplitude of tip displacement is 66.2μm and the generated maximal inertial acceleration is 10.2ms-2 at a driving voltage of 10V,a frequency of 11Hz,and the clamping length of cantilever bimorph vibrator between 9and 20mm.Simulation and experimental results indicate that with the same excitation field,the longer the clamping length,the smaller the amplitude of displacement and the larger the inertial acceleration produced by the piezoelectric bimorph vibrator.