并联电容式RF MEMS开关的系统级设计与分析

System-level Design and Analysis of Parallel Capacitive RF MEMS Switch

针对传统设计方法分析RF MEMS开关的周期比较长的缺点,提出了一种基于静电控制的低压并联MEMS开关的系统级设计分析方法,实现了并联电容式RF MEMS开关的快速设计与优化分析。该方法采用Coventorware软件ARCHITECT模块搭建并联电容式RF MEMS开关系统级模型,分析了多物理耦合场下并联电容式RF MEMS开关的动态响应特性,得到位移和电压大小的对应关系曲线。仿真结果表明:系统级分析便于在不同层面上分析和解决问题,结合MEMS器件还可以做相关工艺设计版图分析,便于多次调整参数分析。

Aimed at the long exploitation period of RF MEMS switch analysis,the design and analysis method based on elec- trostatic control was proposed to rapid design and optimization analysis. The parallel capacitive RF MEMS switch system-level mod- el was built by using the software of Coventorware and ARCHITECT modules. The correspondence relation curves between displace- ment and voltage was achieved by analyzing the dynamic response characteristics in the multi-physics coupling field. The results show that the system-level analysis solves problem at different levels, adjusts the parameters, and does the relevant process desig- ning layout analysis combined with MEMS devices.