摘要
针对西门子法三氯氢硅工艺存在的问题进行了技术改造,并对改造前后的工艺进行了对比。
Technological transformations were performed to solve the problems existing in Siemens process for trichlorosilane production. The process before and after transformation were compared.
出处
《氯碱工业》
CAS
2014年第5期25-27,29,共4页
Chlor-Alkali Industry
关键词
三氯氢硅
西门子法
工艺
改进
trichlorosilane
Siemens method
process
improvement
