摘要
光栅在通信、光存储及光谱分析领域具有广泛的应用。对超声辅助UV-LIGA技术制备光栅的可行性进行了试验研究。试验中两次利用超声的特殊效应,实现不同的辅助功能。1)采用超声辅助显影,通过改善光刻胶模沟槽内的物质传输,提高光刻胶模结构的显影效率和显影质量。2)在后烘之后、显影之前对光刻胶结构进行超声处理,通过在空气中对光刻胶模结构进行超声处理,有效降低SU-8胶模在电铸过程中的溶胀。选取优化的工艺参数,采用侧向冲液电铸方式,获得了镍基光栅。
The grating is widely used in the fields of communication,optical storage and spectroscopy. In this paper,the experiment of grating preparation by ultrasonic-assisted UV-LIGA is conducted. Different auxiliary functions are realized by using special ultrasonic effects twice. Firstly,the ultrasonic-assisted process is used to improve the substances transmission in the photoresist mold groove,the developing efficiency and quality. Secondly,the ultrasonic-assisted developing is introduced between the processes of post-baking and developing,and the structure of photoresist mold is subjected to the ultrasonic treatment in the air,then the swelling of plastic mold of SU-8 is reduced evidently in the electroforming process. The process parameters are optimized and the lateral red liquid electroforming way is adopted. Finally,a thickness of 65μm nickel based grating is successfully prepared.
出处
《机械制造与自动化》
2014年第2期163-166,共4页
Machine Building & Automation
关键词
光栅
超声
辅助
ultrasound-assisted
UV-LIGA
grating preparation
