摘要
利用高真空直流磁控溅射仪,在玻璃衬底上制备了结构为"Glass/Ta(6nm)/NiFe(6nm)/CoFe(1nm)/Cu(3nm)/CoFe(t nm)/IrMn(11nm)/Ta(6nm)"的自旋阀.研究了被钉扎层CoFe的厚度t对自旋阀磁性能的影响,当t为7.5nm时自旋阀主要性能达到最佳,并且在外加磁场4 000Oe下,270℃保温3h退火处理后,自旋阀的GMR值进一步达到5.5%,自由层矫顽力为3Oe,交换偏置场为130Oe.通过以上的优化方案,可以研制出高磁电阻率、低矫顽力和大交换偏置场的自旋阀.
The spin valve with Glass/Ta(6 nm)/NiFe(6 nm)/CoFe(1 nm)/Cu(3 nm)/CoFe(tnm)/IrMn (11 nm)/Ta(6 nm) was made on glass substrate by using high vacuum DC magnetron sputtering equipment. The influence of t (thickness of the pinned layer CoFe) on the magnetic properties of the spin valve was investigated and the performance of the valve was found to be optimum when t was 7.5 nm. After being annealed at 270℃ for 3 hours in a magnetic field with 5.5 %, the coer spin valve clvlty high reduced to 30e and the exchange bias MR,small coercivity and high exchange 4 000 Oe, field was 1 bias field the GMR of the valve increased to 30 Oe. By this optimal method,the can be obtained.
出处
《甘肃科学学报》
2014年第3期59-61,共3页
Journal of Gansu Sciences
基金
甘肃省科学院青年科技创新基金项目计划(2012QN-07)
甘肃省科学院应用研究与开发计划(2013JK-01)
甘肃省科学院应用研究与开发计划(2013JK-02)
关键词
自旋阀
被钉扎层
磁电阻值
退火
Spin valve
Pinned layer
Magnetoelectric resistance
Anneal