PECVD系统中等离子体参数径向分布的研究

Analysis of radial distribution of plasma parameters in PECVD system

分别通过Langmuir静电探针测量和数值模拟方法研究了等离子体增强化学气相沉积系统中氩等离子体中电子密度和电子平均能量的径向分布规律.实验结果表明:从放电中心到电极边缘方向,电子密度和电子平均能量呈逐渐增大的趋势.数值模拟结果和Langmuir静电探针测量结果符合得较好.

The radial distribution of the electron density and the mean electron energy of argon radio frequency glow discharge plasma in a plasma enhanced chemical vapor disposition （PECVD）system have been measured using a movable Langmuir probe and simulated by the proposed numerical simulation method. The experimental results indicate that. from the center of the glow to the edge of electrodes, the electron density and the mean electron energy show a trend of a trend of gradual increase. The results of numerical simulation agree well with the Langmuir probe measurement results.