衬底预应变对Sm-Fe-B超磁致伸缩薄膜磁性能的影响

Effects of substrate prestrain on magnetic property of Sm-Fe-B giant magnetostrictive thin films

采用离子束溅射沉积法在不同预应变衬底上制备Sm-Fe-B超磁致伸缩薄膜(GMF)。使用LK-G150激光微位移传感器与交变梯度磁强计(AGM)分别测试薄膜悬臂梁自由端偏转量与磁滞回线,以研究衬底预应变对薄膜磁致伸缩性能及软磁性能的影响。研究结果表明,在预应变衬底上所制备薄膜样品的低场磁敏性明显优于无预应变衬底上镀膜所获样品,且矫顽力较无衬底预应变样品减小;张预应变衬底上镀膜所获样品长、短轴方向磁滞回线之间差异变大,磁各向异性增强,易磁化轴位于长轴方向;而压预应变衬底上镀膜所获样品长轴与短轴方向磁滞回线之间差异减小,磁各向异性减小。

Sm-Fe-B GMFs are prepared by ion beam sputtering deposition on substrate with different prestrain. Deflection of cantilever and hysteresis loop of films ale tested by LK-150 laser micro-displacement sensor and alternating gradient magnetometer（AGM）, respectively, and influence of substrate perstrain on magnetostriction and soft magnetic of films is studyed. The results of research show that magnetostrictive sensitivity at low field of sample prepared on substrate with prestrain is superior to that of sample prepared on substrate with no strain, and coercive force of sample prepared on substrate with prestrain decrease. The difference between long and short axis of sample prepared on substrate with tension prestrain increases, showing the magnetic anisotropy increases, and long axis is easy magnetization axis. The difference between long and short axis of sample prepared on substrate with compress prestrain decreases, showing the magnetic anisotropy decreases.